Module I


I. Micro and Nanotechnology

1.1 Microtechnical processes I
1.2 Microtechnical processes II
1.3 Sensors and actuators in the NMT field
1.4 System integration


Module Description

This module is the entrance gate to the micro and nano world. Since miniaturization means a change in paradigm in terms of realizing technical functions as well as in production processes, students should understand the basic technologies that made the micron-revolution possible and successful.

As most of the applied materials are no longer taken from the shelf (excepting the substrates) but produced on place the responsibility of their quality is shifted from an input quality controller to the process engineer and a broad knowledge of materials is expected from him in this field, too. These basics are taught in course 1.2 .

As surfaces dominate over volumes in miniaturized systems the focus of the micron-engineer is more on interfaces than on the bulk, from which the importance of thin films, their deposition and as well their removing, becomes obvious. Pattern transfer is another issue since a cost effective result can only be expected by either massively parallelized processes or very high speed. Photolithography is one answer to this and is treated in this module in its classic form of UV- lithography as well as in the form of single beam processes. These basic processes are the content of course 1.3 .

System-engineering has a different meaning in miniaturized systems since subsystems are not necessarily fabricated independently and added then together, but conceptually and physically integrated from the very beginning of the fabrication. This concept is the main concern of course 1.4.

As for precision mechanics the standard machining tools have to be available, micromachining needs the availability of precision tools and so does the nanoengineering need micro machined tools such as AFM-tips for the manipulations of atoms in the nanoworld. Actuation and sensing principles for micro fabricated devices are therefore included in this module. These basic energy conversion principles are treated in course 1.5 .